Masking effect of the nanoscratched silicon (100) surface was studied and applied to a maskless nanofabrication technique. First, the surface of the silicon (100) was machined by ductile-regime nanomachining process using the scratch option of the Nanoindenter ® XP. To clarify the possibility of the nanoscratched silicon surfaces for the application to wet etching mask, the etching characteristic with a KOH solution was evaluated at room temperature. After the etching process, the convex nanostructures were made due to the masking effect of the mechanically affected layer. Moreover, the height and the width of convex structures were controlled with varying normal loads during nanoscratch.

Polishing processes are widely used in the glass, optical, die and semiconductor industries. Chemical Mechanical Polishing (CMP) especially is becoming one of the most important ULSI processes for the O.25m generation and beyond. CMP is conventionally carried out using abrasive slurry and a polishing pad. But the surface of the pad has irregular pores, so there is non-uniformity of slurry flow and of contact area between wafer and the pad, and glazing occurs on the surface of the pad. This paper introduces the basic concept and fabrication technique of the next generation CMP pad using micro-molding method to obtain uniform protrusions and pores on the pad surface.

As optical communication is being substituted for telecommunication, the demand of a large variety of fiber optic components is increasing. V -groove substrates, one of the module components, are used to connect optical fibers to optical planar circuits and to arrange fibers. Their applications are multi-channel optical connectors and optical wave-guide fiber coupling, etc. Because these substrates are a critical part of the splitter in a multiplexer and a multi fiber connector, precise and reliable fabrication process is required. For precisely aligning core pitch between fibers, machined core pitch tolerance should be within sub-microns. Therefore, these are generally produced by state-of-the-art micro-fabrication like MEMS. However, most of the process equipment is very expensive. It is also difficult to change the process line for custom designs to meet specific requirements using various materials. For various design specifications such as different values of the V angie and low-priced process, the fabrication method should be flexible and low cost. To achieve this goal, we have suggested a miniaturized machine tool with high accuracy positioning system. Through this study, it is shown that this cutting process can be applied to produce V-groove subtracts. We also show the possibility of using a miniaturized machining system for producing small parts.

A cutting force model predicting the dynamic force induced by the axial vibration of a plate in face milling is introduced. When a plate face is milled, deformation in tool axial direction is considerable. Therefore, cutting forces are affected by not only inner-outer modulation in feed direction but also by axial deformation. A PTP (peak-to-peak) diagram made by the simulated dynamic force model is evaluated. The stability of the face milling process such as the chatter outset, and the stable cutting region can be simply estimated. Simulation results are compared with that of experiment.

This paper presents neural network based controller using the feedback error learning technique for a heavy load pointing system. Also the mathematical model was developed to analyze heavy load pointing system. The control scheme consists of a feed forward neural network controller and a fixed-gain feedback controller. This neural network controller is trained so as to make the output of the feedback controller zero. The proposed controller is compared with the conventional PI controller through simulations, and the results show that the pointing accuracy of the proposed control system are improved against the disturbance induced by vehicle running on the bump course.

An extension of interaction matrix formulation to the problem of system and disturbance identification for a plant that is corrupted by both process and output disturbances is presented. The learning control develops controllers that learn to improve their performance at executing a given task, based on experience performing this task. The simplest forms of learning control are based on the same concept as integral control, but operating in the domain of the repetitions of the task. This paper studies the use of such controllers in a decentralized system, such as a robot moving on the vertical plane with the controller for each link acting independently. The basic result of the paper is to show that stability and iterative precision of the learning controllers for all subsystems when the coupling between subsystems is turned off, assures stability of the decentralized learning in the coupled system, provided that the sample time in the digital learning controller is sufficiently short. The methods of learning system are shown up for the iterative precision of each link.

This paper presents the study on damage diagnosis of an intelligent cantilevered beams using PZT actuator and PVDF sensor. This study provides the theoretical and experimental verification to examine structural damage. Time domain analysis for the non-destructive detection of damage is presented by parameterized partial differential equations and Galerkin approximation techniques. The time histories of the vibration response of structure were used to identify the presence of damage. Furthermore, this systematic approach permits one to use the piezomaterials to both excite and sense the vibration of structures. We also carried out the experimental verification about reliability of theoretical methods for detecting the damage of a composite beam with PZT actuator and PVDF sensor. Experimental results are presented from tests on cantilevered composite beams which is damaged at different location and different dimensions. The results were compared with the simulation results. Good agreement between the results was found for the time shifts and amplitude difference in transients response of the cantilevered beam.

The analysis of relative pose(position and rotation) between stereo cameras is very important to determine the solution that provides three-dimensional information for an arbitrary moving target with respect to robot-end. In the space of free camera-model, the rotational parameters act on non-linear factors acquiring a kinematical solution. In this paper the general solution of active stereo that gives a three-dimensional pose of moving object is presented. The focus is to achieve a derivation of linear equation between a robot's end and active stereo cameras. The equation is consistently derived from the vector of quaternion space. The calibration of cameras is also derived in this space. Computer simulation and the results of error-sensitivity demonstrate the successful operation of the solution. The suggested solution can also be applied to the more complex real time tracking and quite general and are applicable in various stereo fields.

Human uses level difference and time difference to get space information. Therefore this paper shows that method to presume direction of sound source by time difference and to mark presumed position. The position means direction from geometrical center of sensors to the sound source.
To get the time difference of microphones input level, we will be explained about arrangement of microphones which used for the sensor to take the sound signal. It is included distance among the 3 microphones and distance between microphones and sound source. Secondly, input signals are transmitted to CPU througth digital process. CPU is used to DSP(Digital Signal Processor) for manage the signal by real time. Finally, the position of sound source is perceived by an explained alogrithm in this paper.

Internet provides the useful method to monitor the current states of the machine tool no matter where a personnel monitors it. In this paper, a monitoring method of the torque of the machine tool's spindle induction motor using internet is suggested. To estimate the torque accurately, spindle driving system of an CNC lathe is divide into two parts, induction motor part and mechanical part attached to the induction motor spindle. Magnetizing current is calculated from the measured 3 phase currents without speed sensor used to estimate the torque generated by an induction motor. In mechanical part of the system, some of the torque is used to overcome friction and remaining torque is used to overcome cutting force. An equation to estimate friction torque is drawn as a function of cutting torque and rotation speed. Graphical programming is used to implement the suggested algorithm, to monitor the torque of an induction motor in real time and to make the estimated torque monitored on client computers. Torque of the spindle induction motor is well monitored on the client computers in about 3% error range under various cutting conditions.

The eddy current brake system is a non-contact brake based on the mutual relation between the rail and the frame. Consequently, the accuracy is required in estimating the stress concentration and the deformation of the eddy current brake system. In this paper, the static analysis considering the gravity and the suction force for the deformation and the stress concentration of the main frame of the initially designed eddy current brake system was carried out. The shape of the I-type beam obtained from the optimization was analyzed and compared with the initial model. Also, the initial model was modified based on the optimization model and the result was verified to have the acceptable improvement.

Recently, the finite element absolute nodal coordinate formulation (ANCF) was developed for the large deformation analysis of flexible bodies in multi-body dynamics. This formulation is based on the finite element procedures and the general continuum mechanics theory to represent the elastic forces. In this paper, a computation method of dynamic stress in flexible multi-body dynamics using absolute nodal coordinate formulation is proposed. Numerical examples, based on an Euler-Bernoulli beam theory, are shown to verify the efficiency of the proposed method. This method can be applied for predicting the fatigue life of a mechanical system. Moreover, this study demonstrates that structural and multi-body dynamic models can be unified in one numerical system.