Recently, new perovskite cathode material, SrCo_0.8Nb_0.1Ta0.1O_3-δ (SCNT) was reported, showing high oxygen reduction reaction (ORR) activity. This study demonstrates thin film deposition of SCNT by pulsed laser deposition technique applied to anodic aluminum oxide (AAO) based thin-film solid oxide fuel cells (TF-SOFCs) to assess the possibility of SCNT application to TF-SOFCs. The SCNT powder and the target were prepared by the solid state reactive sintering method (SSRS). This target was then mounted to the pulsed laser depositing machine and deposited on the Si wafer, and the nano-porous substrate, AAO. The physical structure and the chemical phase were investigated by the field emission scanning electron microscope, focused ion beam scanning electron microscope, and X-ray diffraction. On the top of the AAO, thin Pt film and yttria stabilized zirconia (YSZ) were first deposited by sputtering and the SCNT was deposited on the top of it afterward. The open circuit voltage of AAO cell was tested at 500°C, and successful polarization activity of SCNT was observed.

Solid oxide fuel cells (SOFCs) are at a technological level close to commercialization, which could be enabled by new material research. Especially, not only an electrolyte, but also a cathode material becomes very important to further increase electrochemical performance, due to the effort to lower operating temperature of SOFCs to intermediate range (400-600℃) to take advantage of high and low temperature operation. Unfortunately, this trend inevitably results in demand for new cathode materials with high oxygen reduction reaction activity, as well as high mechanical durability. Recently, ceramic materials which conduct oxygen ion, proton, and electron, thereby called ‘triple conducting oxide’ are being highlighted, due to their excellent material properties, to be used for cathodes of SOFCs. This paper reviews the three representative triple-conducting oxides, which were already used and tested in SOFC operating conditions.

Thin film solid oxide fuel cells (TF-SOFCs) are considered to be a promising next generation energy conversion device. TFSOFCs have many advantages such as rapid turn-on and off, fuel flexibility, material flexibility, high power density and availability of compact system. Electrodes and electrolytes of TF-SOFCs are fabricated by thin film processes. In order to fabricate high performance TF-SOFCs, proper thin film processes have to be used due to the unique requirements of each part of the TF-SOFCs. This paper reviews the thin film deposition process for fabrication of TF-SOFCs and the advantages and disadvantages of physical and chemical vapor deposition processes. In addition, materials prepared through thin film processes and the performance results of TF-SOFCs are reviewed.