The demand for inspection of high-speed systems for machined Carbon Fiber Reinforced Plastics parts for automobileindustry and aviation industry is constantly rising. One of the factors that degrade the performance of an inspection system is micro-vibration from the ground or structure where is placed. Various isolation systems that suppress the vibration have been studied classified as either passive or active system. The passive system is composed of a spring and a damper while the active system suppresses the vibration through an electronic control system using sensors and actuators. In this study, a voice coil motor (force constant 55N/A) acting as the actuator is optimally designed using permeance method and sequential quadratic programming algorithm to suppress the vibration and reaction force by a specimen moving stage. The two optimized voice coil motors are attached to a pneumatic mount that has an advantage in design based on the force and size constraints required by the user for an active vibration isolator with velocity sensors (GS-11d). The active vibration isolation system with the four active vibration isolators -23 dB and -20 dB at resonance frequencies in horizontal and vertical transmissibility performs better than a passive vibration isolation system.
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