In soft robotics, gripper technology based on granular jamming offers the capability to adapt flexibly to objects of diverse shapes and material properties. Specifically, small-scale jamming grippers can address tasks challenging for conventional grippers either by enhancing gripping performance or by extending functionality when combined with rigid grippers. This study investigated effects of membrane morphology, thickness, and material on performances of small-scale jamming grippers to identify optimal design parameters. Experiments were conducted with three membrane morphologies, two thickness levels, and two material types. Results indicated that a concentric-pocket membrane morphology, a membrane thickness of 1.5 mm, and a soft material such as Dragon Skin 10 achieved a superior holding force of 430.7 gf. These findings indicate that softer materials can improve the membrane's ability to conform to objects, while increasing thickness can minimize deformation due to tensile forces, thereby enhancing gripping stability. Furthermore, experiments demonstrated that this configuration could enable the gripper to safely grasp objects of various shapes and perform additional tasks, such as rotating valves and handles, with effectiveness.

Most of the consumables used in the CMP (Chemical Mechanical Planarization) process are discarded because it is difficult to reuse them. Slurry accounts for most of the consumables, so research is being conducted to reduce the amount of slurry used. A previous study explains that when the same amount of slurry is injected, the material removal rate is improved when the slurry is injected wide and thin instead of the tube nozzle, which is the conventional slurry injection method. However, there was no change in the injection method due to the problems of the injection method suggested in previous studies and the lack of follow-up studies. Thus, in this paper, an injection method through an ultrasonic spray nozzle is proposed to improve the problems of the injection method proposed in previous studies. Additionally, it is intended to calculate the slurry film thickness according to the spraying range and to explain the effect of the film thickness on the material removal rate.