As the size of semiconductor devices gradually decreases, it is important to measure and analyze semiconductor devices, to improve the image quality of semiconductors. We use VDSR, one of the Super-Resolution methods to improve the quality of semiconductor devices’ SEM images. VDSR is also a convolutional neural network that can be optimized with various parameters. In this study, a VDSR model for semiconductor devices’ SEM images was optimized using parameters such as depth of layers and amount of training data. Meanwhile, the quantitative evaluation and the qualitative evaluation did not match at the low scale factor. To solve this problem, we proposed an MTF measurement method using the slanted edge for better quantitative evaluation. This method was verified by comparing the results with the PSNR and SSIM index results, which are known as quality indicators. Based on the results, it was confirmed that using the MTF value could be a better approach for the evaluation of SEM images of the semiconductor device than using PSNR and SSIM.

In this paper, we would like to introduce an in-line MTF (Modulation Transfer Function) measuring system which is compatible with the automated assembly process line of lens-modules in smartphone cameras. This in-line optical inspection system consists of a resolution chart module, Dual Cono-Scope Telecentric Lenses, imaging lenses, and a single detector. Unlike conventional measuring devices with many cameras that are more commonly used in the industry, this device can evaluate the MTF performance without reversing the lens module in an upside down position by applying a reverse projection method. So, it is possible to measure MTF for the full-fields of the lens module from any arbitrary desired positions, as well as the designated positions by using a single camera. This makes it compatible with the equipment of the automated production process line for lens modules. We will expect that the lens module production line will be diversified and fully automated through the application of this in-line optical inspection system.