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"선택적 증착"

Article
Fabrication of Micro Pattern Through Analysis of Contact Area of the Jet-Circulating Electrodeposition
Haan Kim, Chong Nam Chu
J. Korean Soc. Precis. Eng. 2019;36(6):523-529.
Published online June 1, 2019
DOI: https://doi.org/10.7736/KSPE.2019.36.6.523
In the Jet-Circulating electrodeposition, selective electrodeposition is done using the local circulation of the electrolyte. The Scale of fabricated patterns using the Jet-Circulating electrodeposition is dependent on the contact area between the nozzle and the workpiece surface through the electrolyte circulation. The shape of the electrolyte meniscus determines the contact area. The factors that influence the shape of the meniscus include the electrolyte jetting parameter and the characteristics of the workpiece surface. The jet distances are analyzed based on the shape of the electrolyte meniscus and contact area which is dependent on the jetting pressure and the suction pressure. In order to investigate the effect of contact area on the workpiece surface, the surface is treated using Hexamethyldisilazane spin coating, self-assembled monolayer formation, and Neverwet ® spray coating. The contact angle and the contact area based on the surface treatment methods are analyzed. The width of the copper patterns fabricated through Jet-Circulating electrodeposition are compared. The copper pattern width of the self-assembled monolayer formation surface had reduction of 30% in comparison to the untreated surface.
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