Journal of the Korean Society for Precision Engineering

Design and Performance Test of Fast Steering Mirror: Byoung Ju Lee, Yong Hoon Lee, Hyeong Rae Kim, Ye Eun Bae, Sang Uk Nam, Jae Woo Jung, Sang Won Jung, Young Jin Park, Jun Young Yoon, No Cheol Park, Seoung Han Lee; J. Korean Soc. Precis. Eng. 2025;42(11):927-936.
Published online November 1, 2025; DOI: https://doi.org/10.7736/JKSPE.025.070

Abstract
PDF

Currently, advanced countries such as the US and the UK are researching laser-based weapons and communication systems. The application of Fast Steering Mirror (FSM) is crucial in laser systems to control internal optical paths and compensate for disturbances, including atmospheric fluctuations and mechanical vibrations. Additionally, research is underway to enhance image clarity in surveillance and reconnaissance systems, such as Electro-Optical/Infrared (EO/IR) systems, by applying FSM technology. Consequently, the demand for FSMs is rising, necessitating the development of small, lightweight, and high-performance solutions. In this study, we designed a compact and lightweight FSM with a diameter of 25 mm, and its performance was validated through rigorous testing. Furthermore, we developed a piezoelectric actuator using single crystal piezoelectric material to ensure a wide operating bandwidth and rapid response speed for the FSM. Before manufacturing the designed FSM, we conducted modeling and simulation (M&S) to analyze its performance and confirm that it met the required specifications. Subsequently, a prototype of the FSM was produced, and its operating range, bandwidth, and accuracy were evaluated through performance tests.

18 View
1 Download

Dynamic Model of Fast Steering Mirror based on Piezoelectric Actuator: Yongsu Park, Geemin Lee, Dae Gyu Choi; J. Korean Soc. Precis. Eng. 2024;41(8):647-651.
Published online August 1, 2024; DOI: https://doi.org/10.7736/JKSPE.024.050

Abstract
PDF

The fast steering mirror is now being used in industries beyond precision processing, such as space and defense. The piezoelectric fast steering mirror (PFSM), which utilizes a piezoelectric actuator, is particularly suitable for these industries as they often require devices like electro-optic devices to withstand external vibrations and impacts. While the PFSM has inherent high stiffness, its complex structure makes it difficult to control. To address this, an accurate dynamic model is necessary. In this paper, we derived a dynamic model for the PFSM using a two-inertial system model that takes into account its structural characteristics. This dynamic model consists of both a mechanical system model and an electrical system model. We measured the frequency response function from electrical input to mechanical output and compared it with the derived frequency response model to verify its accuracy. The derived model can be used not only for control design, but also for instrument design and interpretation.

10 View
0 Download

Development and Performance Evaluation of a Fine Stage for Compensating 6-DOF Motion Errors of an Ultra-Precision Linear Stage: Hoon-Hee Lee, In-Seok Lee, Kwang-Il Lee, Seung-Han Yang; J. Korean Soc. Precis. Eng. 2021;38(2):123-129.
Published online February 1, 2021; DOI: https://doi.org/10.7736/JKSPE.020.083

Abstract
PDF

In ultra-precision processes, such as aerospace parts and precision mold machining, the accuracy of a feed drive system should be secured to achieve sufficient form accuracy. Dual-Servo stages, which compensate for multi-DOF motion errors, are being developed depending on the applied processes. This paper deals with the fine stage of a dual-servo stage to compensate for 6-DOF motion errors of a linear stage. The proposed fine stage measured 6-DOF errors of the linear stage motion with capacitive sensors, a reference mirror, and an optical encoder. It compensated for the errors using the flexure hinge mechanism with piezo actuators. The error equations and the inverse kinematics were derived to calculate the 6- DOF errors and displacements of piezo actuators for 6-DOF motions, respectively. Performance evaluation was implemented to verify feasibility of the developed fine stage of the fabricated dual-servo stage. Through the step response test of the fine stage, compensation resolutions for the translational and the rotational motion were confirmed to be less than 10 nm and 1/3 arcsec, respectively. The 6-DOF motion errors in the verification test were reduced by 73% on average.

Citations

Citations to this article as recorded by

Study on Comparison of Friction Force between Ball- and Roller-LM Guides
Hyeon Jeong Ra, Dong Wook Kim, Jun Man Lee, Han Seon Ryu, Jae Han Joung, Young Hun Jeong
Journal of the Korean Society for Precision Engineering.2023; 40(11): 907. CrossRef

7 View
0 Download
Crossref

Development of a Test Equipment for Diaphragm Deflection Using a PZT Actuator: Dae Jhoong Yoon, Jung Hwan Ahn; J. Korean Soc. Precis. Eng. 2017;34(12):927-932.
Published online December 1, 2017; DOI: https://doi.org/10.7736/KSPE.2017.34.12.927

Abstract
PDF

The aim of this paper is the development of a PZT-driven apparatus for testing the force-deflection behavior of thin 0.1/0.5-㎜-thick plates. Thin plates are widely used as the diaphragm of pressure sensors, as they are much stronger than the thin films with thicknesses of up to several tens of ? that are used in MEMS applications. Therefore, a proper PZT actuator should be selected to acquire the static- and dynamic-material properties of these thin plates to perform testing in terms of the force and frequency responses. Based on the investigation of the PZT characteristics, a test apparatus is developed. It is verified for the Hastelloy C-276 that the static-force deflection, acquired through sample testing, is compatible with the theoretical one; moreover, the dynamic test is available up to approximately 20 ㎐.