High aspect ratio-arrayed micro structures are used in various fields such as semiconductor packaging, biochip, nano composite material and superhydrophobic surface. Micro electric discharge machining (MEDM) has an advantage, in that hard material can be easily removed regardless of mechanical properties of the material. Reverse micro electric discharge machining (REDM) can process various shapes and arrayed features. In this study, REDM was used for fabrication of a micro tool of eccentric shape, and was assisted with vibration to improve machining efficiency. The bored plate made of brass, was prepared as a tool for REDM. Because of the shape of the tool, concentration of debris occurs and increases machining time. The effect of vibration-assisted MEDM on emission of debris and machining time was described for the range of 2 - 6 μm amplitudes and of 100 - 900 Hz frequencies. As a result, vibration applied on machining reduces approximately 55% of machining time.
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