Recently, Laser Direct Imaging (LDI) has been used to replace lithography in Flexible Printed Circuit Board (FPCB) manufacturing. However, repeated motion of a linear motor caused residual vibration in the granite on which the workpiece was placed when the motor either accelerated or decelerated. Because the residual vibration made positioning less accurate, there were more defective products and worse productivity. This paper proposes a way to reduce vibration in the granite during the precision stage. First, the frequency domain of the vibrations of a pneumatic vibration isolator is identified. Second, we present the design of the mechanism using a voice coil actuator and a capacitive displacement sensor. Third, we apply a feedback control algorithm based on PID to cancel displacement. Consequently, we are able to propose an optimal way to reduce vibration for the laser direct imaging equipment. The amount of vibration reduction is evaluated in terms of amplitude and settling time.