Digital twin technology offers the advantage of monitoring the status of equipment, systems, and more in a virtual environment, allowing validation through simulation. This technology has found numerous applications in the industrial robotics field, driven by recent advancements in the manufacturing industry. Consequently, predicting machining quality using digital twin technology is imperative for ensuring high-quality processed goods. In this study, we developed a digital twin program based on a cutting-force physical model and created a performance enhancement module that allows the visualization of material removal for user convenience. The predicted cutting forces from both conventional CNC and the physical model demonstrate a high accuracy of within 2%. Within the digital twin environment, the error rate for the robotic drilling process is 13.5%. Building upon this, we developed and validated a module for material removal visualization, aiming to increase convenience for on-site operators.

This paper presents one-axis high precision scanning system and illustrates the design of modified X-Y-θ stage as a tracker using VCM and commercialized air bearings for it. The scanning system for 100㎚ resolution is composed of the 3-axis stage and one axis long stroke linear motor stage as a follower. In this study a previous proposed and presented structure of VCM for the fine stage is modified. The tracker has 3 DOF(X-Y-θ) motions by four VCM actuators which are located on the same plane. So 4 actuating forces are suggested and designed to create least pitch and roll motions. This article will show about the design especially about optimal design. The design focus of this fine stage is to have high acceleration to accomplish high throughput. The optimal design of maximizing acceleration is performed in restrained size. The most sensitive constraint of this optimal design is heat dissipation of coil. There are 5 design variables. Because the relationship between design variables and system parameters are quite complicated, it is very difficult to set design variables manually. Due to it, computer based optimal design procedure using MATLAB is used. Then, this paper also describes the procedures of selecting design variables for the optimal design and a mathematical formulation of the optimization problem. Based on the solution of the optimization problem, the final design of the stage is also presented. The results can be verified by MAXWELL. The designed stage has the acceleration of about 5 ㎨ with 40㎏ total mass including wafer chuck and interferometer mirror. And the temperature of coil is increased 50°C. In addition, the tracker is controlled by high precision controller system with HP interferometer for it and linear scaler for the follower. At that time, the scanning system has high precision resolution about 5㎚ and scanning resolution about 40㎚ in 25㎜/s constant speed.