In the current SI (International System of Units), the kilogram is defined by the mass of a material artefact. In this instance, because the artefact can be damaged during use, the present definition is inherently considered unstable. To overcome the shortcomings of the present kilogram definition, the SI will be redefined in near future. In the new SI, the kilogram will be redefined by fixing the numerical value of the Planck constant. After the kilogram redefinition, realization experiments which link the Planck constant to the mass will be necessary. In the new SI, the kilogram will be realized through experiments including the Kibble balance and the X-ray crystal density. The Kibble balance, which is named for the scientist Bryan P. Kibble, is an electromechanical device comparing mechanical power and electrical power. The electrical power is proportional to the Planck constant, because of the voltage and resistance are measured using the Josephson effect and the quantum Hall effect, respectively. The Planck constant is an invariant and not a characteristic of a man-made object, or a specific experiment. The new mass unit is more stable than the current one, and will pave the way for the advancement of precision measurement.

A high precision air bearing stage has been developed and calibrated. This linear-motor driven stage was designed to transport a glass or wafer with the X and Y following errors in nanometer regime. To achieve this level of precision, bar type mirrors were adopted for real time ΔX and ΔY laser measurement and feedback control. With the laser wavelength variation and instability being kept minimized through strict environment control, the orthogonality of this type of control system becomes purely dependent upon the surface flatness, distortion, and assembly of the bar mirrors. Compensations for the bar mirror distortions and assembly have been performed using the self-calibration method. As a result, the orthogonality error of the stage was successfully decreased from 0.04° to 2.48 arcsec.

To establish of standard technique of nano-length measurement in 2D plane, new AFM system has been designed. In the long range (about several tens of ㎛), measurement uncertainty is dominantly affected by the Abbe error of XY scanning stage. No linear stage is perfectly straight; in other words, every scanning stage is subject to tilting, pitch and yaw motion. In this paper, an AFM system with minimum offset of XY sensing is designed. And XY scanning stage is designed to minimize rotation angle because Abbe errors occur through the multiply of offset and rotation angle. To minimize the rotation angle optimal design has performed by maximizing the stiffness ratio of motion direction to the parasitic motion direction of each stage.
This paper describes the design scheme of full AFM system, especially about XY stage. Full range of fabricated XY scanner is 100㎛×100㎛. And tilting, pitch and yaw motion are measured by autocollimator to evaluate the performance of XY stage. As a result, XY scanner can have good performance.
Using this AFM system, 3um pitch specimen was measured. The uncertainty of total system has been evaluated. X and Y direction performance is different. X-direction measuring performance is better. So to evaluate only ID pitch length, X-direction scanning is preferable. Its expanded uncertainty(k=2) is √(3.96)²+(4.10×10??×p)², where p is the measured length in ㎚.