UVW Stage is widely used in manufacturing processes of PCB, LCD, OLED, and semiconductor industries. The precision of UVW Stage is closely associated with the quality of products. Two approaches for kinematics of UVW Stage are proposed for comparative analysis. Program of proposed kinematics algorithm is developed for motion control and applied to UVW Stage driving. The position of the stage for each algorithm is sequentially measured by laser interferometer. Both virtual stage and real stage are used for accuracy analysis. The performance of each algorithm is evaluated based on this accuracy analysis.

This paper is study of solving vibration problem occurred in moving hand of wafer transfer robot in semiconductor manufacturing line. Long settling time for decreasing vibration makes low production rate, and moreover the excessive vibration of hand sometimes breaks the wafer in a cassette. The ways of reducing the moving speed and changing the type of motion profile did not help for lessening vibration. Therefore, we analyzed the mechanical property of the hand such as natural frequency, and frequency component of the motion profile currently used in the manufacturing line. In several conditions of motion profile, we found the best condition of which the frequency component in near of natural frequency of the hand is minimal and this induced small vibration in moving hand. The results were verified theoretically and experimentally using frequency analysis.

Line scan camera has been widely used in the area of inspection of glass, film, fabric, iron, PCB and etc. due to the high resolution and the high speed. We developed the line scan based vision system to inspect tangled and cut-off status of yarn in the manufacturing process. The original image is binarized with a proper threshold, and the gap distances in the yarn are measured in real time, so finally the status of the process is decided by the maximum value of the gap distance. All procedures are executed in real time by realization of multi-processed threads. By implementation of this system, the error of the yarn in manufacturing process can be precedently monitored and the loss of the yarn is decreased efficiently.