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Article
A Study on the Dual Servo System for Nano Machining Processing
Gyung-Il Lee
J. Korean Soc. Precis. Eng. 2022;39(8):557-563.
Published online August 1, 2022
DOI: https://doi.org/10.7736/JKSPE.022.066
In the framework of the 4th industrial revolution, modern machine building rapidly converges with IOT technology. This requires a very high level of precision machining of parts and assemblies, such as electronics, vehicle and components, agricultural and construction machines, optical instruments, and machine tools. However, high precision machinery is considerably expensive, and so a general need for low-cost equipment exists. While many researchers study this, they focus mainly on cutting tools. This study, for its part, focused on compensating errors and enhancing machinery precision, by adding a servo controller to the processing unit. As a result, we designed a fine dual servo system, ensuring 10 nm positioning accuracy and 40 nm of surface roughness.
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