Silicon carbide (SiC) is chemically stable, highly heat-resistant, and resistant to thermal shock. SiC having excellent characteristics in a high temperature and high voltage environment is used in high-power semiconductors, highprecision mechanical devices, optical components, etc. As it is used in various industries, there is a growing demand for processing fine holes or grooves in silicon carbide. In this study, micro holes and grooves were machined on 4HSiC and sintered SiC using electrical discharge machining (EDM). Silicon carbide which has very high hardness can be easily processed by EDM as compared with mechanical processes. As a tool material, a polycrystalline diamond (PCD) which has high wear resistance was used and a micro tool of a diameter of 100 μm was fabricated by wire electrical discharge grinding (WEDG). In the EDM of SiC, the machining characteristics such as surface roughness, discharge gap, and tool wear were investigated.
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Micro Hole Machining Characteristics of Glassy Carbon Using Electrical Discharge Machining (EDM) Jae Yeon Kim, Ji Hyo Lee, Bo Hyun Kim Journal of the Korean Society for Precision Engineering.2025; 42(4): 325. CrossRef
Prediction of Machining Conditions from EDMed Surface Using CNN Ji Hyo Lee, Jae Yeon Kim, Dae Bo Sim, Bo Hyun Kim Journal of the Korean Society for Precision Engineering.2024; 41(11): 865. CrossRef
Silicon carbide (SiC) has been used as a material for semi-conductor, molds, and micro-electro-mechanical systems (MEMS) because of its superior thermal, electrical, and mechanical properties. However, micro machining of SiC is very challenging due to its hardness and brittleness. This paper presents an experimental study of micro hole drilling of SiC. In this study, polycrystalline diamond (PCD) was used as a tool to overcome the hardness of SiC. The micro PCD tool with a diameter of 110 μm was fabricated by micro electrical discharge machining (EDM). Micro drilling was conducted with varying machining parameters such as tool rotational speed and feed rate. Effects of surface roughness of the tool and lubrication method were also investigated.
Citations
Citations to this article as recorded by
Micro Hole Machining Characteristics of Glassy Carbon Using Electrical Discharge Machining (EDM) Jae Yeon Kim, Ji Hyo Lee, Bo Hyun Kim Journal of the Korean Society for Precision Engineering.2025; 42(4): 325. CrossRef
Prediction of Machining Conditions from EDMed Surface Using CNN Ji Hyo Lee, Jae Yeon Kim, Dae Bo Sim, Bo Hyun Kim Journal of the Korean Society for Precision Engineering.2024; 41(11): 865. CrossRef
Machining Characteristics of Micro EDM of Silicon Carbide Ju Hyeon Lee, Chan Young Yang, Bo Hyun Kim Journal of the Korean Society for Precision Engineering.2024; 41(2): 131. CrossRef
Study on Micro Grooving of Tungsten Carbide Using Disk Tool Min Ki Kim, Chan Young Yang, Dae Bo Sim, Ji Hyo Lee, Bo Hyun Kim Journal of the Korean Society for Precision Engineering.2024; 41(2): 123. CrossRef
EDM Using Wire Electrical Discharge Milling Electrode Do Kwan Chung Journal of the Korean Society for Precision Engineering.2022; 39(1): 21. CrossRef
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