Hyperspectral imaging is a promising technology utilized in various fields, including physics, chemistry, and astrophysics. It can be categorized into point, line, and spectral scanning techniques based on the principle of obtaining hyperspectral cubes. Recently, snapshot hyperspectral imaging techniques have been developed to reduce acquisition time. This review introduces various types of hyperspectral imaging techniques, along with their basic principles and applications. Additionally, it discusses the advantages and disadvantages highlighted in recent research on hyperspectral imaging. This review aims to provide insight into the development of hyperspectral imaging techniques and their appropriate applications.

In this investigation, we propose a simple and effective lateral shearing interferometer based on a polarization grating. In the lateral shearing device, an incident beam is split into two beams by a polarization grating, and the returning beams can be laterally shifted after reflecting off a flat mirror and passing through the polarization grating again. These two beams are not only laterally shifted, but also their polarization states are orthogonal to each other as circular polarizations. With a single image obtained by a pixelated polarization CMOS camera, the proposed LSI can obtain the phase map corresponding to the x-sheared interferogram, and the other phase map can be calculated from another single image obtained by 90° rotation of the shearing device. Then, the original wavefront corresponding to the surface figure of the specimen can be reconstructed by wavefront reconstruction algorithms. In the experiments, various wavefronts generated by concave mirrors and a deformable mirror were measured and compared with those of a commercial Shack-Hartmann sensor.

In this investigation, we propose a flexible structured illumination microscope (FSIM) to eliminate mechanical moving parts for the phase shifts in the spatial pattern and longitudinal scanning of the specimen. In order to prevent these mechanical motions, we adopt a focus-tunable lens and digital micromirror device (DMD) to replace the lateral motion of the pattern and the scanning of the specimen, respectively, which leads to the enhancement of rapid and precise measurement results for measuring the 3D surface profile of specimens. To realize the proposed system, two types of flexible structured illumination microscopes, Macro and micro types, were constructed and their performances were verified with a plane mirror and step height specimens.

Spectrally resolved interferometry (SRI) is an attractive technique to measure absolute distances without any moving components. In the spectral interferogram obtained by a spectrometer, the optical path difference (OPD) can simply be extracted from the linear slope of the spectral phase. However, SRI has a fundamental measuring range limitation due to maximum and minimum measurable distances. In addition, SRI cannot distinguish the OPD direction because the spectral interferogram is in the form of a natural sinusoidal function. In this investigation, we describe a direction determining SRI and propose the optimal conditions for determining OPD direction. Spectral phase nonlinearity, caused by a dispersive material, effects OPD direction but deteriorates spectral interferogram visibility. In the experiment, various phase nonlinearities were measured by adjusting the dispersive material (BK7) thickness. We observed the interferogram visibility and the possibility of direction determination. Based on the experimental results, the optimal dispersion conditions are provided to distinguish OPD directions of SRI.

In this investigation, we describe a metrological technique for surface and thickness profiles of a silicon (Si) wafer by using a 6 degree of freedom (DOF) stitching method. Low coherence scanning interferometry employing near infrared light, partially transparent to a Si wafer, is adopted to simultaneously measure the surface and thickness profiles of the wafer. For the large field of view, a stitching method of the sub-aperture measurement is added to the measurement system; also, 6 DOF parameters, including the lateral positioning errors and the rotational error, are considered. In the experiment, surface profiles of a double-sided polished wafer with a 100 mm diameter were measured with the sub-aperture of an 18 mm diameter at 10x10 locations and the surface profiles of both sides were stitched with the sub-aperture maps. As a result, the nominal thickness of the wafer was 483.2 μm and the calculated PV values of both surfaces were 16.57 μm and 17.12μm, respectively.

In this investigation, we explain the sub-sampling technique of white light scanning interferometry (WLSI) to improve the measurement speed. In addition to the previous work using Fourier domain analysis, several methods to extract the height from the correlogram of WLSI are described with the sub-sampling technique. Especially, Fourier-inverse Fourier transformation method adopting sub-sampling technique is proposed and the phase compensation technique is verified with simulation and experiments. The main advantage of sub-sampling is to speed up the measurements of WLSI but the precision such as repeatability is slightly poor. In case of measuring the sample which has high height step or difference, the proposed technique can be widely used to reduce the measurement time.

In this investigation, we constructed and demonstrated a simple Yb-doped fiber laser, of which longitudinal modes are mode-locked without any additional devices to compensate the dispersion caused by optical components. Non-linear polarization rotation (NPR) was adopted for the modelocking mechanism and a polarization controller (PC) was used for a kind of spectral filters to restrict the bandwidth for mode-locking. As the result, the laser was successfully operated as mode-locked with the repetition rate of 42.2 MHz and the spectrum was broadened up to approximately 16 nm at 1033 nm center wavelength when the laser was mode-locked. In this paper, the operation of the developed Yb-doped mode-locked laser is explained with the concept of Lyot filter realized by a PC, which enables mode-locking under normal dispersion. In the industrial applications, this laser can be used as a seed laser of the high power lasers for optical manufacturing.