The fabrication of a micro column array using micro EDM (Electrical Discharge Machining) and eccentric tools was presented. With the eccentric tools, micro columns can be easily machined only by feeding the tool vertically, as is the case in mechanical drilling. Moreover, the tool electrode rotates very fast, which is helpful to flush dielectric fluid in the EDM. In this paper, four eccentric tools were machined, and a micro column was machined in a few minutes. Finally, a hundred micro columns with 200-300 μm in a diameter were machined on a metal plate. In this study, vibration-assisted EDM was introduced to improve the machining rate in the fabrication of eccentric tools. Also, the design parameters of eccentric tools were discussed.