Microchannels machining can be used to make micro molds for microfluidic chips. The fluid flow in the channel can be controlled, by changing the cross sectional shape of the channel. V-shaped channels with a specific angle are not easily made with the etching process. This study presents the mechanical machining of microchannels of V-shaped cross section, on cemented carbide (WC-Co). In this study, to reduce tool wear in the process of machining, the micro conical tool was fabricated using polycrystalline diamond (PCD). The tool wear of the conical tool and form accuracy of channels, were investigated during V-shaped microchannel machining.
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Micro Hole Machining Characteristics of Glassy Carbon Using Electrical Discharge Machining (EDM) Jae Yeon Kim, Ji Hyo Lee, Bo Hyun Kim Journal of the Korean Society for Precision Engineering.2025; 42(4): 325. CrossRef
Machining Characteristics of Micro EDM of Silicon Carbide Ju Hyeon Lee, Chan Young Yang, Bo Hyun Kim Journal of the Korean Society for Precision Engineering.2024; 41(2): 131. CrossRef
Study on Micro Grooving of Tungsten Carbide Using Disk Tool Min Ki Kim, Chan Young Yang, Dae Bo Sim, Ji Hyo Lee, Bo Hyun Kim Journal of the Korean Society for Precision Engineering.2024; 41(2): 123. CrossRef
Silicon carbide (SiC) has been used as a material for semi-conductor, molds, and micro-electro-mechanical systems (MEMS) because of its superior thermal, electrical, and mechanical properties. However, micro machining of SiC is very challenging due to its hardness and brittleness. This paper presents an experimental study of micro hole drilling of SiC. In this study, polycrystalline diamond (PCD) was used as a tool to overcome the hardness of SiC. The micro PCD tool with a diameter of 110 μm was fabricated by micro electrical discharge machining (EDM). Micro drilling was conducted with varying machining parameters such as tool rotational speed and feed rate. Effects of surface roughness of the tool and lubrication method were also investigated.
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Citations to this article as recorded by
Micro Hole Machining Characteristics of Glassy Carbon Using Electrical Discharge Machining (EDM) Jae Yeon Kim, Ji Hyo Lee, Bo Hyun Kim Journal of the Korean Society for Precision Engineering.2025; 42(4): 325. CrossRef
Prediction of Machining Conditions from EDMed Surface Using CNN Ji Hyo Lee, Jae Yeon Kim, Dae Bo Sim, Bo Hyun Kim Journal of the Korean Society for Precision Engineering.2024; 41(11): 865. CrossRef
Machining Characteristics of Micro EDM of Silicon Carbide Ju Hyeon Lee, Chan Young Yang, Bo Hyun Kim Journal of the Korean Society for Precision Engineering.2024; 41(2): 131. CrossRef
Study on Micro Grooving of Tungsten Carbide Using Disk Tool Min Ki Kim, Chan Young Yang, Dae Bo Sim, Ji Hyo Lee, Bo Hyun Kim Journal of the Korean Society for Precision Engineering.2024; 41(2): 123. CrossRef
EDM Using Wire Electrical Discharge Milling Electrode Do Kwan Chung Journal of the Korean Society for Precision Engineering.2022; 39(1): 21. CrossRef
High aspect ratio-arrayed micro structures are used in various fields such as semiconductor packaging, biochip, nano composite material and superhydrophobic surface. Micro electric discharge machining (MEDM) has an advantage, in that hard material can be easily removed regardless of mechanical properties of the material. Reverse micro electric discharge machining (REDM) can process various shapes and arrayed features. In this study, REDM was used for fabrication of a micro tool of eccentric shape, and was assisted with vibration to improve machining efficiency. The bored plate made of brass, was prepared as a tool for REDM. Because of the shape of the tool, concentration of debris occurs and increases machining time. The effect of vibration-assisted MEDM on emission of debris and machining time was described for the range of 2 - 6 μm amplitudes and of 100 - 900 Hz frequencies. As a result, vibration applied on machining reduces approximately 55% of machining time.
Citations
Citations to this article as recorded by
Micro Hole Machining Characteristics of Glassy Carbon Using Electrical Discharge Machining (EDM) Jae Yeon Kim, Ji Hyo Lee, Bo Hyun Kim Journal of the Korean Society for Precision Engineering.2025; 42(4): 325. CrossRef
Study on Micro Grooving of Tungsten Carbide Using Disk Tool Min Ki Kim, Chan Young Yang, Dae Bo Sim, Ji Hyo Lee, Bo Hyun Kim Journal of the Korean Society for Precision Engineering.2024; 41(2): 123. CrossRef
Machining Characteristics of Micro EDM of Silicon Carbide Ju Hyeon Lee, Chan Young Yang, Bo Hyun Kim Journal of the Korean Society for Precision Engineering.2024; 41(2): 131. CrossRef
Micro Drilling of Single Crystal SiC Using Polycrystalline Diamond Tool Ui Seok Lee, Chan Young Yang, Ju Hyeon Lee, Bo Hyun Kim Journal of the Korean Society for Precision Engineering.2021; 38(7): 471. CrossRef
Micro Pin Fabrication of Tungsten Carbide Using Polycrystalline Diamond Joo A Park, Ui Seok Lee, Bo Hyun Kim Journal of the Korean Society for Precision Engineering.2020; 37(11): 791. CrossRef
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