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Article
Fabrication of Anisotropically Oleophobic Surface with Inverse-Tapered Structure Using Micromolding in Capillaries and Microtransfer Molding
Ki Yeon Hong, Dong-Ki Lee, Sungdong Kim, Young Hak Cho
J. Korean Soc. Precis. Eng. 2019;36(4):413-418.
Published online April 1, 2019
DOI: https://doi.org/10.7736/KSPE.2019.36.4.413
Fabrication of inverse-tapered structure remains as a problem in the fabrication of oleophobic surface mostly due to the complications and the high cost of processes. In this paper, we propose a simple and low-cost fabrication method of inverse-tapered structured oleophobic surface using micromolding in capillaries (MIMIC) and microtransfer molding followed by MEMS processes. Silicon wafer molds for the formation of inverse-tapered structure were made using MEMS processes such as photolithography and anisotropic KOH etching of silicon wafer. The geometry of structure could be changed by controlling the etching depth of the silicon wafer mold. After covering the surface of the mold using flat UV tape, the formed space between mold and UV tape was filled with pre-cured PDMS by capillary force and then cured in oven. The tapered structure on UV tape was transferred and bonded to glass wafer by O₂ plasma treatment. The fabricated inverse-tapered structure was coated with a fluoroalkylsilane monolayer to reduce its surface energy. The wetting behaviors were investigated by the contact angle (CA) measurement of hexadecane droplets. This study demonstrates that an inversetapered structure can be fabricated on a substrate using micromolding in capillaries and microtransfer molding, whose surface shows the superoleophobicity.

Citations

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  • Fabrication of Acoustophoretic Device with Lateral Polymer Wall for Micro-Particle Separation
    Sungdong Kim, Su Jin Ji, Song-I Han, Arum Han, Young Hak Cho
    Journal of the Korean Society for Precision Engineering.2022; 39(5): 379.     CrossRef
  • Fabrication of anisotropic wetting surface with asymmetric structures using geometrical similarity and capillary force
    Ye-Eun Lee, Dong-Ki Lee, Young Hak Cho
    Micro and Nano Systems Letters.2019;[Epub]     CrossRef
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