A fine stage is developed for the 3-DOF error compensation of a linear axis in order to improve the positioning accuracy. This stage is designed as a planar parallel mechanism, and the joints are based on a flexure hinge to achieve ultra-precise positioning. Also, the effect of Abbe’s offsets between the measuring and driving coordinate systems is minimized to ensure an exact error compensation. The mode shapes of the designed stage are analyzed to verify the desired 3-DOF motions, and the workspace and displacement of a piezoelectric actuator (PZT) for compensation are analyzed using forward and inverse kinematics. The 3-DOF error of a linear axis is measured and compensated by using the developed fine stage. A marked improvement is observed compared to the results obtained without error compensation. The peak-to-valley (PV) values of the positional and rotational errors are reduced by 92.6% and 91.3%, respectively.
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Development and Performance Evaluation of a Fine Stage for Compensating 6-DOF Motion Errors of an Ultra-Precision Linear Stage Hoon-Hee Lee, In-Seok Lee, Kwang-Il Lee, Seung-Han Yang Journal of the Korean Society for Precision Engineering.2021; 38(2): 123. CrossRef
Optimal On-Machine Measurement of Position-Independent Geometric Errors for Rotary Axes in Five-Axis Machines with a Universal Head Kwang-Il Lee, Jae-Chang Lee, Seung-Han Yang International Journal of Precision Engineering and Manufacturing.2018; 19(4): 545. CrossRef
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Face- and Body-Diagonal Length Tests using a Double Ball-Bar for Squareness Errors of Machine Tools Seung-Han Yang, Hoon-Hee Lee, Kwang-Il Lee International Journal of Precision Engineering and Manufacturing.2018; 19(7): 1039. CrossRef
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