Most of the consumables used in the CMP (Chemical Mechanical Planarization) process are discarded because it is difficult to reuse them. Slurry accounts for most of the consumables, so research is being conducted to reduce the amount of slurry used. A previous study explains that when the same amount of slurry is injected, the material removal rate is improved when the slurry is injected wide and thin instead of the tube nozzle, which is the conventional slurry injection method. However, there was no change in the injection method due to the problems of the injection method suggested in previous studies and the lack of follow-up studies. Thus, in this paper, an injection method through an ultrasonic spray nozzle is proposed to improve the problems of the injection method proposed in previous studies. Additionally, it is intended to calculate the slurry film thickness according to the spraying range and to explain the effect of the film thickness on the material removal rate.

Water spraying work to prevent the dust from scattering during building dismantling operation has usually been done manually. Since it is very risky and often causes fatal accidents due to unexpected collapse, a few countries have adopted mechanical water spaying machines. However, these machines are still operated by human laborer, specifically in orienting the spraying direction, which induces low dust suppression efficiency. In this research, an automated fine dust tracking system was suggested to identify and track the dust generating position accurately. A GPS is installed on the secured body of the excavator which contains a crusher as an end-effector for building dismantlement. Assuming the position of the crusher is the dust generating spot, a forward kinematics analysis is performed to identify the crusher position from the body origin on which the GPS sensor is placed. With another GPS on the water-spraying robot, its relative position to the dust generating spot and its heading angle for tracking can be calculated consequently. Tracking experiments were conducted with a miniature excavator and a reduced size water spraying robot. The results showed a sufficient tracking performance enough to be applied to the water spaying machines.