In this paper, a multi-material non-assemble 3-DOF Force-Sensor was proposed and developed to improve the efficiency in the manufacturing. The PLA-Filament was used to produce the frame-structure and the elastic-deformation, and the conductive-PLA-filament, to produce a transducer. A dual-nozzle 3D-Printer was applied to produce the monolithic-structuretype force-sensor with the multi-materials simultaneously in single-manufacturing-process. The sensor was designed in a tripod-structure to detect the 3-DOF force-components in an external-force and a mechanical-interpretation was conducted on the elastic-deformation, which acts as a load-cell. The output model of a Wheatstone-bridge circuit-based transducer serving as a strain-gauge was also produced. A calibration-testing device, comprising a rotating stage, which turns with 2- DOF (θ, ϕ), was also developed to apply force in every direction. By conducting the calibration test, the relations between the input and output were computed in as a matrix and the resolution of the sensor was determined through the evaluation of linearity and stability deviations.

In this research, a precise on-machine line-profile measuring system that compensates for the motion-error from the linear-guide, which can influence the accuracy of the measurement of the profile was developed. For this purpose, the principle of measuring the system model was used to analyze the compensating motion error component for line-profile and 3 types of MPES method (Integration-Method, the Fourier-Model-Method, and the Sequential-Method). The multi-probe-error-separation-method (MPES) was applied to calculate the motion-error, which in turn was used to compensate for the measured linear-profile of the specimen. Lastly, the simulation conditions involving a multi-probe measurement system consisting of a reference-artifact, capacitive-sensor, and three displacement-sensors were designed and Monte-Carlo simulation was implemented for the evaluation of the 3 types of MPES method. Also, the simulation results obtained from the conventional measuring system and the proposed system were compared for the verification of the performance of the latter. Consequently, efficient compensation of the motion error appeared as possible and the applicability of the multi-probe measurement system was confirmed.

In this paper, six-degree-of-freedom (DoF). Displacement measurement technique using a compact stereo-vision system is proposed. The measuring system consists of a camera, an optical prism, two plane mirrors, and a planar marker on a target. The target was attached on an object so that its six-DoF displacement can be calculated using a proposed coordinates estimating algorithm and stereo images of the marker. A prototype was designed and fabricated for performance test. From the test results, it can be confirmed that the proposed measuring technique can be applied to monitoring and control of various manipulators.

A 20 mm diameter of small 5-D.O.F. force sensor has been developed for applications in MR-field Optical intensity modulation was adopted for transducing to miniaturize the sensor structure. For its accurate sensing of 5-D.O.F. force/moment, the elastic detecting module was designed to respond independently to each force or moment component. And for small size, two optical transducing modules of 2-D.O.F. and 3-D.O.F. were designed and integrated with the detecting module where optical fibers were arranged in parallel to make the sensor small. It is confirmed by calibration test that the detecting modules deforms linearly and independently to the input force. The results of evaluating test show that the range and resolution of forces are ±4 N and 0.94~7.1 mN and the range and resolution of moments are ±120 N·mm and 0.023~0.034 N·mm.

A force/torque sensor using carbon fiber plate was designed and developed to make the sensor be able to measure a wide range of multi degree of force and torque. Using carbon fiber plate of 0.3 mm thickness, the sensor was designed and developed, which has a μN level order of resolution and about 0.01 N ~ 390 N of wide measurement range. The elastic deformation part has a tripod plate structure and strain gauges are attached on the part to detect the force/torque. The coefficient of determination for the sensor is over 0.955 by the calibration experiment so that the linearity of the sensor is confirmed to be good. Also, experiments on applying 0.005 ~ 40 ㎏ (0.05 ~ 390 N) to each axis were implemented and the sensor is proved to be safe under a high load. Finally, to verify the function calculating the direction of load vector, the directions of various load vectors which have the same magnitude but different directions and the directions of the calculated load vectors are compared and analyzed to accord well.

This paper presents an ultra precision machining system using a high sensitive force sensing module to measure machining forces and penetration displacement in a tip-based nanopatterning. The force sensing module utilizes a leaf spring mechanism and a capacitive displacement sensor and it has been designed to provide a measuring range from 80 μN to 8 N. This force sensing module is mounted on a PZT driven in-feed motion stage with 1 ㎚ resolution. The sample can be moved by X-Y scanning motion stage with 5 ㎚ resolution. In nano indentation experiments and patterning experiments, the machining forces were controlled and monitored by the force sensing module. Then, the patterned samples were measured by AFM. Experimental results demonstrated that the developed system can be used as an effective device in nano indentation and nanopatterning operation.

In this study, a microchip system fabricated with MEMS technology was developed to detect bioelectrical signals.
The developed microchip using the conductivity of gold nanoparticles could detect the biopotential with a high sensitivity. For designing the microchip, simulations were performed to understand the effects of the size and number of nanoparticles, and the sensing width between electrodes on the detection of biosignals. Then, a series of experiment was performed to validate the simulation results and understand the feasibility of the proposed microchip design. Both simulation and experimental results showed that as the sensing width between electrodes increased the conductivity decreased. Also, the conductivity increased as the density of gold nanoparticles increased. In addition, it was found that the conductivity that changes with the nanoparticles density could be approximated by a cumulative normal distribution function. The developed microchip system could effectively apply when a biosignals should be measured with a high sensitivity.

This paper proposes precision evaluation method for the positioning error of three-DOF translational parallel mechanism. The proposed method uses conventional CMM as metrology equipment to measure the position of end-effector. In order to obtain accurate measurement data from CMM, the transform relationship between the coordinate system of the parallel mechanism and the CMM coordinate system must be identified. For this purpose, a new coordinate referencing (or coordinate system identification) technique is presented. By using this technique accurate coordinate transformation relationships are efficiently established. According to these coordinate transformation relationships, an equation to calculate error components at any arbitrary position of the end-effector is derived. In addition, mathematical fitting models to represent the position error components in the two-dimensional workspace of the parallel mechanism are also constructed based on response surface methodology. The proposed error evaluation method proves its effectiveness through the experimental results and its application to real three-DOF parallel mechanism.