The energy saving effect of reactant plasma in Atomic Layer Deposition (ALD) of ultrathin solid oxide fuel cell electrolyte was examined by measuring electrical current in real time. Actuating a plasma generator led to a remarkable change in electric current and therefore a Plasma Enhanced ALD (PE-ALD) Yttria-Stabilized Zirconia (YSZ) supercycle demanded ~12% higher process energy than a Thermal ALD (T-ALD) YSZ supercycle. Nonetheless, because PE-ALD YSZ electrolyte providing higher growth rate and higher gas tightness needed 2 times smaller cycle number compared to T-ALD YSZ electrolyte, applying oxygen plasma in ALD of YSZ electrolyte resultantly reduced total process energy by ~44%.