Skip to main navigation Skip to main content
  • E-Submission

JKSPE : Journal of the Korean Society for Precision Engineering

OPEN ACCESS
ABOUT
BROWSE ARTICLES
EDITORIAL POLICIES
FOR CONTRIBUTORS

Page Path

1
results for

"Parabolic flexure hinge"

Article category

Keywords

Publication year

Authors

"Parabolic flexure hinge"

Article
Analysis on Elliptic and Parabolic 2-DOF Flexure Hinges for Spatial Positioning Stages
Hyun-Pyo Shin, Jun-Hee Moon
J. Korean Soc. Precis. Eng. 2023;40(3):229-236.
Published online March 1, 2023
DOI: https://doi.org/10.7736/JKSPE.022.120
With advancements in semiconductor manufacturing processes and the development of precision processing technology, flexure hinge-based ultra-precision positioning stages are widely used. In the flexure hinge, axial and bending stiffness properties greatly influence positioning performance. This study examined the stiffness properties of elliptic and parabolic 2-degrees-of-freedom (DOF) hinges, which have not been extensively discussed. The Timoshenko beam theory was applied to derive the stiffness equations for the axial and bending directions of each hinge. The stiffness properties were examined in several design conditions by comparing theoretical and finite element analyses. Based on the results of the analyses, an empirical formula in exponential form for the design of an elliptic hinge was constructed through surface-fitting. The elliptic hinge was found to be a better alternative to a circular hinge under certain design conditions by adjusting two design parameters. In the future, we will develop sophisticatedly designed hinges with improved axial and bending stiffness properties compared to the existing circular and elliptic hinges.

Citations

Citations to this article as recorded by  Crossref logo
  • Derivation and Verification of Novel Phenomenon-based Theoretical Formulas for the Axial Compliance of Circular Flexure Hinges
    Jun-Hee Moon, Hyun-Pyo Shin
    Journal of the Korean Society for Precision Engineering.2025; 42(1): 47.     CrossRef
  • 8 View
  • 0 Download
  • Crossref