The residual vibration during the high acceleration and deceleration of a motion stage degrades the manufacturingsystem productivity and lifespan. Although a passive RFC mechanism with a movable magnet track reduces the residual vibration of the system base, a magnet track resonance may occur according to the motion profile, and the mover inposition error increases due to the residual vibration of the magnet track. We investigated input-shaping methods for a linear motor motion stage with a passive RFC mechanism. An air-bearing linear motor motion stage with the passive RFC mechanism is built, and the dynamic characteristic of the passive RFC mechanism is identified using a freevibration test. Then, mover velocity profiles are generated using various input-shaping methods. Further, the effects of the input-shaping methods on the air-bearing linear motor motion stage are investigated by comparing the magnet track oscillation, settling time, and mover in-position error. Finally, several input-shaping methods are applied to reduce the mover rise-time delay for the proposed linear motor motion stage. A properly shaped input motion profile removes the residual vibration of the passive RFC mechanism without any additional devices, as well as reducing the transmitted reaction force and the in-position error.

Recently, Laser Direct Imaging (LDI) has been used to replace lithography in Flexible Printed Circuit Board (FPCB) manufacturing. However, repeated motion of a linear motor caused residual vibration in the granite on which the workpiece was placed when the motor either accelerated or decelerated. Because the residual vibration made positioning less accurate, there were more defective products and worse productivity. This paper proposes a way to reduce vibration in the granite during the precision stage. First, the frequency domain of the vibrations of a pneumatic vibration isolator is identified. Second, we present the design of the mechanism using a voice coil actuator and a capacitive displacement sensor. Third, we apply a feedback control algorithm based on PID to cancel displacement. Consequently, we are able to propose an optimal way to reduce vibration for the laser direct imaging equipment. The amount of vibration reduction is evaluated in terms of amplitude and settling time.