As system performance continues to improve at higher resolutions, it becomes increasingly important to establish standards for imaging degradation caused by optical windows. In this study, random surface shapes were simulated on large area optical windows with peak-to-valley (P-v) values of 0.25, 0.5, and 1.0 λ. Modulation Transfer Function (MTF) values were derived for 1,000 cases per P-v value using Monte-Carlo simulations. The specifications achieved a surface accuracy of 0.5 λ and a parallelism of 0.01 mm. MTF measurements showed that the system MTF was 13.5% prior to the installation of the optical window, and 13.1% after installation. This indicates a degradation rate of approximately 3%.