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"Taewook Kim"

Article
Laser-induced Deposition Method for Mask-less Copper Patterning on the Glass Substrate
Yonghoon Lee, Hwanggyu Lee, Dong Min Kim, Taewook Kim, Jisoo Kim
J. Korean Soc. Precis. Eng. 2023;40(12):965-973.
Published online December 1, 2023
DOI: https://doi.org/10.7736/JKSPE.023.084
This study investigated the Laser-Induced Plasma Backward Deposition (LIPBD) process for transparent glass-copper composite film production. LIPBD was compared with Laser-Induced Backward Transfer (LIBT). Controlling laser parameters and the z-axis position of Depth of focus (DOF) resulted in various post-deposition outcomes. The optimal deposition depth was 10 μm to 90 μm, ensuring good glass-copper adhesion. Scanning electron microscopy (SEM) and energy dispersive spectroscopy (EDS) mapping confirmed copper and copper oxide (CuO) particles. X-ray diffraction confirmed Cu and CuO peaks. The adhesive test showed a strong binding between glass and deposition, but the parts of the cracks caused by heat accumulation were delaminated during the test. LIPBD offers controlled deposition potential for glass-copper composites. Optimizing laser parameters leads to high-quality films. This study provides valuable insights into nanotechnology and the semiconductor industry, with potential applications across diverse fields.
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