Recently, instrument stages using flexure guide mechanisms and piezo actuators have been widely used for an ultra-precision positioning system in various industries. Research into ultra-precision position control aiming at nanoscale position errors during stage driving is being actively conducted, as well as various studies on the motion profile adjusting the reference input. In this study, we suggested a motion profile with snap and feedforward for use with a high speed nano scanning system, as compared and analyzed with the position tracking error through feedback control, and also compared to the related feed with the forward control noted as minimized at the position error to 14.19 nm. As a result, a tracking error when applying the fourth profile with snaps to the piezoelectric stage, is obtained with an error reduction effect of about 15%, as compared to when the second profile is applied.