Silicon carbide (SiC) has been used as a material for semi-conductor, molds, and micro-electro-mechanical systems (MEMS) because of its superior thermal, electrical, and mechanical properties. However, micro machining of SiC is very challenging due to its hardness and brittleness. This paper presents an experimental study of micro hole drilling of SiC. In this study, polycrystalline diamond (PCD) was used as a tool to overcome the hardness of SiC. The micro PCD tool with a diameter of 110 μm was fabricated by micro electrical discharge machining (EDM). Micro drilling was conducted with varying machining parameters such as tool rotational speed and feed rate. Effects of surface roughness of the tool and lubrication method were also investigated.
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Micro Hole Machining Characteristics of Glassy Carbon Using Electrical Discharge Machining (EDM) Jae Yeon Kim, Ji Hyo Lee, Bo Hyun Kim Journal of the Korean Society for Precision Engineering.2025; 42(4): 325. CrossRef
Prediction of Machining Conditions from EDMed Surface Using CNN Ji Hyo Lee, Jae Yeon Kim, Dae Bo Sim, Bo Hyun Kim Journal of the Korean Society for Precision Engineering.2024; 41(11): 865. CrossRef
Machining Characteristics of Micro EDM of Silicon Carbide Ju Hyeon Lee, Chan Young Yang, Bo Hyun Kim Journal of the Korean Society for Precision Engineering.2024; 41(2): 131. CrossRef
Study on Micro Grooving of Tungsten Carbide Using Disk Tool Min Ki Kim, Chan Young Yang, Dae Bo Sim, Ji Hyo Lee, Bo Hyun Kim Journal of the Korean Society for Precision Engineering.2024; 41(2): 123. CrossRef
EDM Using Wire Electrical Discharge Milling Electrode Do Kwan Chung Journal of the Korean Society for Precision Engineering.2022; 39(1): 21. CrossRef
Micro tool fabrication is crucial in micro machining. Wire electro-discharge grinding (WEDG) is one of the popular methods applied to fabricate micro tools used for micro electrical discharge machining (EDM), electrochemical machining (ECM), and ultrasonic machining (USM). WEDG can machine micro tools or features regardless of workpiece hardness. In WEDG, however, the machining speed is relatively low and the discharge gap control is not easy. In this study, the micro mechanical machining using the polycrystalline diamond is introduced to fabricate the micro cylindrical tool or micro pin of the tungsten carbide. This method demonstrates the possibility of applying ductile machining of tungsten carbide without brittle fracture or cracks. This paper compared the machining characteristics such as material removal rate and surface roughness with the PCD-mechanical machining and WEDG.
Citations
Citations to this article as recorded by
Micro Hole Machining Characteristics of Glassy Carbon Using Electrical Discharge Machining (EDM) Jae Yeon Kim, Ji Hyo Lee, Bo Hyun Kim Journal of the Korean Society for Precision Engineering.2025; 42(4): 325. CrossRef
Machining Characteristics of Micro EDM of Silicon Carbide Ju Hyeon Lee, Chan Young Yang, Bo Hyun Kim Journal of the Korean Society for Precision Engineering.2024; 41(2): 131. CrossRef
Study on Micro Grooving of Tungsten Carbide Using Disk Tool Min Ki Kim, Chan Young Yang, Dae Bo Sim, Ji Hyo Lee, Bo Hyun Kim Journal of the Korean Society for Precision Engineering.2024; 41(2): 123. CrossRef
SEM Image Quality Improvement and MTF Measurement Technique for Image Quality Evaluation Using Convolutional Neural Network Chan Ki Kim, Eung Chang Lee, Joong Bae Kim, Jinsung Rho Journal of the Korean Society for Precision Engineering.2023; 40(4): 275. CrossRef
EDM Using Wire Electrical Discharge Milling Electrode Do Kwan Chung Journal of the Korean Society for Precision Engineering.2022; 39(1): 21. CrossRef
Micro Drilling of Single Crystal SiC Using Polycrystalline Diamond Tool Ui Seok Lee, Chan Young Yang, Ju Hyeon Lee, Bo Hyun Kim Journal of the Korean Society for Precision Engineering.2021; 38(7): 471. CrossRef
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