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Atmospheric Pressure Plasma Applications to Treat Off-Gases from Semiconductor Manufacturing

Young Hoon Song, Yong Jin Kim
JKSPE 2002;19(8):34-37.
Published online: August 1, 2002
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Atmospheric Pressure Plasma Applications to Treat Off-Gases from Semiconductor Manufacturing
J. Korean Soc. Precis. Eng.. 2002;19(8):34-37.   Published online August 1, 2002
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

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Atmospheric Pressure Plasma Applications to Treat Off-Gases from Semiconductor Manufacturing
J. Korean Soc. Precis. Eng.. 2002;19(8):34-37.   Published online August 1, 2002
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