Reliability Evaluation System of Hot Plate for Photoresist Baking

Jun Yeob Song; Chang Kyu Song; Seung Kook Roh; Hwa Young Park

Articles

Page Path

Article

Reliability Evaluation System of Hot Plate for Photoresist Baking

Jun Yeob Song, Chang Kyu Song, Seung Kook Roh, Hwa Young Park

JKSPE 2002;19(8):180-186.

Published online: August 1, 2002

Author Affiliations

2 Views
0 Download
0 Crossref
0 Scopus

prev next

Full Article

Download PDF

Citations

Citations to this article as recorded by

Cite

CITE

export

Copy Download

Format

Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

Format:

RIS — For EndNote, ProCite, RefWorks, and most other reference management software
BibTeX — For JabRef, BibDesk, and other BibTeX-specific software

Include:

Citation for the content below
Citation and abstract for the content below

Reliability Evaluation System of Hot Plate for Photoresist Baking

J. Korean Soc. Precis. Eng.. 2002;19(8):180-186. Published online August 1, 2002

Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

Format:

RIS — For EndNote, ProCite, RefWorks, and most other reference management software
bib — For JabRef, BibDesk, and other BibTeX-specific software

Include:

Citation for the content below
Citation and abstract for the content below

Reliability Evaluation System of Hot Plate for Photoresist Baking

J. Korean Soc. Precis. Eng.. 2002;19(8):180-186. Published online August 1, 2002

Articles

Page Path

Reliability Evaluation System of Hot Plate for Photoresist Baking

Full Article

Citations

CITE

Download Citation

Format:

Include:

ABOUT

BROWSE ARTICLES

EDITORIAL POLICIES

FOR CONTRIBUTORS