Real-time Compensation of Motion Errors Using Extended Twyman-Green Interferometry

Eun Deok Bae; Jeong Seok Oh; Seung-Woo Kim

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Real-time Compensation of Motion Errors Using Extended Twyman-Green Interferometry

Eun Deok Bae, Jeong Seok Oh, Seung-Woo Kim

JKSPE 2003;20(10):112-119.

Published online: October 1, 2003

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Real-time Compensation of Motion Errors Using Extended Twyman-Green Interferometry

J. Korean Soc. Precis. Eng.. 2003;20(10):112-119. Published online October 1, 2003

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Real-time Compensation of Motion Errors Using Extended Twyman-Green Interferometry

J. Korean Soc. Precis. Eng.. 2003;20(10):112-119. Published online October 1, 2003

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