Fabrication of Micro/Nano-patterns using MC-SPL (Mechano-Chemical Scanning Probe Lithography) Process

In-Ha Sung; Dae-Eun Kim

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Fabrication of Micro/Nano-patterns using MC-SPL (Mechano-Chemical Scanning Probe Lithography) Process

In-Ha Sung, Dae-Eun Kim

JKSPE 2002;19(11):228-233.

Published online: November 1, 2002

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Fabrication of Micro/Nano-patterns using MC-SPL (Mechano-Chemical Scanning Probe Lithography) Process

J. Korean Soc. Precis. Eng.. 2002;19(11):228-233. Published online November 1, 2002

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Fabrication of Micro/Nano-patterns using MC-SPL (Mechano-Chemical Scanning Probe Lithography) Process

J. Korean Soc. Precis. Eng.. 2002;19(11):228-233. Published online November 1, 2002

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Fabrication of Micro/Nano-patterns using MC-SPL (Mechano-Chemical Scanning Probe Lithography) Process

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