Application of Tensile Tester for Thin Film Using ISDG

Seung Woo Han; Sang Joo Lee; Chung Seog Oh; Hyun Gyun Ahn; Sung-Hoon Choa; Hak Joo Lee

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ISDG를 이용한 박막의 인장시험 장치 개발 및 물성 평가

한승우, 이상주, 오충석, 안현균, 좌성훈, 이학주

Application of Tensile Tester for Thin Film Using ISDG

Seung Woo Han, Sang Joo Lee, Chung Seog Oh, Hyun Gyun Ahn, Sung-Hoon Choa, Hak Joo Lee

JKSPE 2005;22(12):28-33.

Published online: December 1, 2005

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Keywords: ISDG(Interferometric Strain/Displacement Gage),Thin film(박막),Mechanical properties(기계적 물성),Young's modulus(탄성계수),Yield strength(항복강도),Tensile strength(인장강도)

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Application of Tensile Tester for Thin Film Using ISDG

J. Korean Soc. Precis. Eng.. 2005;22(12):28-33. Published online December 1, 2005

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Application of Tensile Tester for Thin Film Using ISDG

J. Korean Soc. Precis. Eng.. 2005;22(12):28-33. Published online December 1, 2005

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ISDG를 이용한 박막의 인장시험 장치 개발 및 물성 평가

Application of Tensile Tester for Thin Film Using ISDG

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