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Measurement of Thin Film Thickness of Patterned Samples U sing Spectral Imaging Ellipsometry

Won Chegal, Yong Jai Cho, Hyun Mo Cho, Hyun Jong Kim, Yun Woo Lee, Soo Hyun Kim
JKSPE 2004;21(6):15-21.
Published online: June 1, 2004
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Measurement of Thin Film Thickness of Patterned Samples U sing Spectral Imaging Ellipsometry
J. Korean Soc. Precis. Eng.. 2004;21(6):15-21.   Published online June 1, 2004
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.
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Measurement of Thin Film Thickness of Patterned Samples U sing Spectral Imaging Ellipsometry
J. Korean Soc. Precis. Eng.. 2004;21(6):15-21.   Published online June 1, 2004
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