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A Position Control for a Parallel Stage with 6 degrees of freedom Using Magnetic Actuators

Se-Han Lee
JKSPE 2005;22(7):102-111.
Published online: July 1, 2005
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In this paper, we address a position control for a parallel stage, which is levitated and driven by electric magnetic force. This consists of a levitating object (called platen) with 4 permanent magnetic linear synchronous motors in parallel. Each motor generates vertical force for suspension against gravity and propulsion force horizontally as well. This stage can generate six degrees of freedom motion by the vertical and horizontal force. A dynamic equation of the stage system is derived based on Newton-Euler method and it's special Jacobian matrix describing a relation between the limited velocity and Cartesian velocity is done. There are proposed two control methods for positioning which are Cartesian space controller and Actuator space controller. The control performance of the Cartesian space controller is better than the Actuator space controller in task space trajectory while the Actuator space controller is simpler than the Cartesian space controller in controller realization.

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A Position Control for a Parallel Stage with 6 degrees of freedom Using Magnetic Actuators
J. Korean Soc. Precis. Eng.. 2005;22(7):102-111.   Published online July 1, 2005
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

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A Position Control for a Parallel Stage with 6 degrees of freedom Using Magnetic Actuators
J. Korean Soc. Precis. Eng.. 2005;22(7):102-111.   Published online July 1, 2005
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