Investigation on the Vibration Characteristics of a Symmetric 2DOF Polysilicon Resonator

Yoon Shik Hong; Jong Hyun Lee; Soo Hyun Kim

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Investigation on the Vibration Characteristics of a Symmetric 2DOF Polysilicon Resonator

Yoon Shik Hong, Jong Hyun Lee, Soo Hyun Kim

JKSPE 2000;17(11):81-87.

Published online: November 1, 2000

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Investigation on the Vibration Characteristics of a Symmetric 2DOF Polysilicon Resonator

J. Korean Soc. Precis. Eng.. 2000;17(11):81-87. Published online November 1, 2000

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Investigation on the Vibration Characteristics of a Symmetric 2DOF Polysilicon Resonator

J. Korean Soc. Precis. Eng.. 2000;17(11):81-87. Published online November 1, 2000

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Investigation on the Vibration Characteristics of a Symmetric 2DOF Polysilicon Resonator

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