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JKSPE : Journal of the Korean Society for Precision Engineering

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Contact Print Lithography for Precise Transplantation of Three-dimensional Microstructures into a Microsystem

Sang-Hu Park, Jun-Ho Jeong, Dae-Geun Choi, Ki-Don Kim, Ali Ozhan Altun, Eung-Sug Lee, Dong-Yol Yang, Hong-Jin Kong, Kwang-Sup Lee
JKSPE 2007;24(12):136-142.
Published online: December 1, 2007
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Precise fabrication of three-dimensional (3D) self-standing microstructures on thin glass plates via two-photon induced polymerization (TPP) has been an important issue for innovative 3D nanodevices and microdevices. However, there are still issues remaining to be solved, such as building 3D microstructures on opaque materials via TPP and being able to implant them as functional parts onto practical systems. To settle these issues simply and effectively, we propose a contact print lithography (CPL) method using an ultraviolet (UV)-curable polymer layer. We report some of the possibilities and potential of CPL by presenting our results for transplanting 3D microstructures onto large-area substrates and also our examination of some of the effects of the process parameters on successful transplantation.

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Contact Print Lithography for Precise Transplantation of Three-dimensional Microstructures into a Microsystem
J. Korean Soc. Precis. Eng.. 2007;24(12):136-142.   Published online December 1, 2007
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

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Contact Print Lithography for Precise Transplantation of Three-dimensional Microstructures into a Microsystem
J. Korean Soc. Precis. Eng.. 2007;24(12):136-142.   Published online December 1, 2007
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