A 6-DOF precision stage was developed based on parallel kinematics structure with flexure hinges to eliminate backlash, stick-slip and friction and to minimize parasitic motion coupled with motions in the other-axis directions. For the stage, lever linkage mechanism was devised to reduce the height of system for the enhancement of horizontal stiffness. Frequency response comparison between experimental results and mathematical model extracted from dynamics of the stage was performed to identify the system parameters such as spring constants and damping coefficients of actuation modules, which cannot be calculated accurately by analytic methods owing to their complicated structures. This newly developed precision stage and its identified model will be very useful for precision positioning and control because of its high accuracy and non-coupled movement.
