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Laser Processing Technology in Semiconductor and Display Industry

Kwang Woo Cho, Hong Jin Park
JKSPE 2010;27(6):32-38.
Published online: June 1, 2010
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Laser material processing technology is adopted in several industry as alternative process which could overcome weakness and problems of present adopted process, especially semiconductor and display industry. In semiconductor industry, laser photo lithography is doing at front-end level, and cutting, drilling, and marking technology for both wafer and EMC mold package is adopted. Laser cleaning and de-flashing are new rising technology. There are 3 kinds of main display industry which use laser technology ? TFT LCD, AMOLED, Touch screen. Laser glass cutting, laser marking, laser direct patterning, laser annealing, laser repairing, laser frit sealing are major application in display industry.

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Laser Processing Technology in Semiconductor and Display Industry
J. Korean Soc. Precis. Eng.. 2010;27(6):32-38.   Published online June 1, 2010
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

Format:
Include:
Laser Processing Technology in Semiconductor and Display Industry
J. Korean Soc. Precis. Eng.. 2010;27(6):32-38.   Published online June 1, 2010
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