In micro electrochemical machining (micro ECM), machining conditions have been determined to maintain a small side gap and to machine a workpiece stably. However, machining speed is slow. To improve machining speed while maintaining the form accuracy, the paper investigates machining parameters such as pulse amplitude, duty ratio, pulse on-time, and the electrolyte’s temperature and concentration. The experiment in this study shows that the electrolyte’s concentration is the key factor that can reduce machining time while maintaining the form accuracy. Micro square columns were fabricated to confirm the machining parameters’ effects.