Abstract

To increase the reliability and positional accuracy of a machine tool, a novel capacitive displacement sensor having a cylindrical shape is presented to measure the axial displacement of a machine tool spindle. Characteristics of the sensor were analyzed by numerical simulation. The sensor was built into a specific machine tool spindle and its performance was experimentally investigated. The accuracy of a thermal error compensation system of a machine tool can be enhanced greatly using proposed sensor.

• Keywords: Capacitive Displacement Sensor(정전용량변위센서),Thermal Error Compensation(열변위오차보정),Machine Tool Spindle(공작기계주축)