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A Fine Manipulator with Compliance for Wafer Probing System

Kee-Bong Choi, Soo-Hyun Kim, Yoon Keun Kwak
JKSPE 1997;14(9):68-79.
Published online: September 1, 1997
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A Fine Manipulator with Compliance for Wafer Probing System
J. Korean Soc. Precis. Eng.. 1997;14(9):68-79.   Published online September 1, 1997
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

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A Fine Manipulator with Compliance for Wafer Probing System
J. Korean Soc. Precis. Eng.. 1997;14(9):68-79.   Published online September 1, 1997
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