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Fabrication of Piezo-Driven Micropositioning Stage using 3D printer

Ho Je Jung, Jung Hyun Kim
JKSPE 2014;31(3):277-283.
Published online: March 1, 2014
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This paper presents the design, optimization and fabrication of a piezo driven micro-positioning stage constructed using a 3D-printer. 3D printing technology provides many advantageous aspects in comparison to traditional manufacturing techniques allowing more rapid prototyping freedom in design, etc. Micro-positioning stages have traditionally been made using metal materials namely aluminum. This paper investigates the possibility of fabricating stages using ABS material with a 3D printer. CAE simulations show that equivalent motion amplification can be achieved compared to a traditional aluminum fabricated stage while the maximum stress is 30 times less. This leads to the possibility of stages with higher magnification factors and less load on the driving piezo element. Experiment results agree with the simulation results. A microposition stage was fabricated using a 3D printer with ABS material. The motion amplification is very linear and 50 nm stepping was demonstrated.

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Fabrication of Piezo-Driven Micropositioning Stage using 3D printer
J. Korean Soc. Precis. Eng.. 2014;31(3):277-283.   Published online March 1, 2014
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

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Fabrication of Piezo-Driven Micropositioning Stage using 3D printer
J. Korean Soc. Precis. Eng.. 2014;31(3):277-283.   Published online March 1, 2014
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