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Design and Performance Evaluation of the Precision Pressure Control System for the High Vacuum Transport Module

Won Ick Jang, Kee Ho Jang, Ki Ro Jung , Jong Hyun Lee
JKSPE 1995;12(7):92-98.
Published online: July 1, 1995
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Design and Performance Evaluation of the Precision Pressure Control System for the High Vacuum Transport Module
J. Korean Soc. Precis. Eng.. 1995;12(7):92-98.   Published online July 1, 1995
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.
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Design and Performance Evaluation of the Precision Pressure Control System for the High Vacuum Transport Module
J. Korean Soc. Precis. Eng.. 1995;12(7):92-98.   Published online July 1, 1995
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