In this study, we described the design of a three-axis force/torque sensor for measuring the force and torque in a lower-limb rehabilitation robot. The three-axis force/torque sensor is composed of Fx force sensor, Fz force sensor and Tz torque sensor. The sensing element for Fx force sensor and Tz torque sensor is used in a two-step parallel plate beam, and that of Fz force sensor is used in a parallel plate beam. The rated loads of Fx force sensor, Tz torque sensor and Fz force sensor are 300 N, 15 N m and 100 N, respectively. The three-axis force/torque sensor was designed using the finite element method, and manufactured using strain-gauges. The three-axis force sensor was further characterized. As a result, the interference error of the three-axis force/torque sensor was < 1.24%, the repeatability error of each sensor was < 0.03%, and the non-linearity was < 0.02%.
