In this paper, the classification rate of micro-cracks in silicon wafers was improved using a SVM. In case Ι, we investigated how feature data of micro-cracks and SVM parameters affect a classification rate. As a result, weighting vector and bias did not affect the classification rate, which was improved in case of high cost and sigmoid kernel function. Case II was performed using a more high quality image than that in case I. It was identified that learning data and input data had a large effect on the classification rate. Finally, images from cases I and II and another illumination system were used in case III. In spite of different condition images, good classification rates was achieved. Critical points for micro-crack classification improvement are SVM parameters, kernel function, clustered feature data, and experimental conditions. In the future, excellent results could be obtained through SVM parameter tuning and clustered feature data.
