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끓는점 제어를 이용한 PMMA 열접합 시스템

PMMA Thermal Bonding System Using Boiling Point Control

Journal of the Korean Society for Precision Engineering 2021;38(8):613-618.
Published online: August 1, 2021

1 경남대학교 대학원 첨단공학과

2 경남대학교 기계공학부

1 Department of Advanced Engineering, Graduate School, Kyungnam University

2 School of Mechanical Engineering, Kyungnam University

#E-mail: taehyun@kyungnam.ac.kr, TEL: +82-55-249-2615
• Received: May 24, 2021   • Revised: June 10, 2021   • Accepted: June 27, 2021

Copyright © The Korean Society for Precision Engineering

This is an Open-Access article distributed under the terms of the Creative Commons Attribution Non-Commercial License (http://creativecommons.org/licenses/by-nc/3.0) which permits unrestricted non-commercial use, distribution, and reproduction in any medium, provided the original work is properly cited.

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  • Deformation and strength mechanism of microchannels in thin-film assisted bonding microfluidic chips
    Binni Huang, Wanlin Wang, Huijie Sun, Can Weng
    Microsystem Technologies.2025; 31(6): 1443.     CrossRef

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PMMA Thermal Bonding System Using Boiling Point Control
J. Korean Soc. Precis. Eng.. 2021;38(8):613-618.   Published online August 1, 2021
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J. Korean Soc. Precis. Eng.. 2021;38(8):613-618.   Published online August 1, 2021
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PMMA Thermal Bonding System Using Boiling Point Control
Image Image Image Image Image
Fig. 1 Schematic of polymer thermal bonding protocol
Fig. 2 Thermal compression molding process
Fig. 3 PMMA thermal bonding system and chamber inside
Fig. 4 Temperature graph of PMMA thermal bonding condition using a PMMA thermal bonding system
Fig. 5 Bonding strength test using tension and compression tester
PMMA Thermal Bonding System Using Boiling Point Control

PMMA micro device fabrication conditions and result

Temperature [oC] 160
Pressure [MPa] 7
Time [min] 8
Result

Maximum temperatures for modified regulator weights

Regulator Weight [g] Maximum temperature [oC]
93.97 110.5
70.03 107.1
66.47 106.7
52.00 105.8

Thermal bonding conditions of PMMAs and its cross-sectional views of PMMA samples

Case Depth
[μm]
Width
[μm]
Temperature
[oC]
Pressure
[kPa]
(a) 100 200 100 0
(b) 200 500 100 0
(c) 700 700 100 0
(d) 100 200 105.5 26.2
(e) 200 500 105.5 26.2
(f) 700 700 105.5 26.2
(g) 100 200 110.5 32.4
(h) 200 500 110.5 32.4
(i) 700 700 110.5 32.4

Optimized thermal bonding conditions for PMMA

Chamber temperature [oC] 105.5
Chamber pressure [kPa] 26.2
Bonding time [min] 20

Results of PMMA bonding strength tests

Temperature [oC] 100 105.5 110.5
Chamber pressure [kPa] 0 26.2 32.4
Regulator weight [g] 0 52 93.97
Test results [N] N/A 195.5 ±1 252.2 ± 1.5
Table 1 PMMA micro device fabrication conditions and result
Table 2 Maximum temperatures for modified regulator weights
Table 3 Thermal bonding conditions of PMMAs and its cross-sectional views of PMMA samples
Table 4 Optimized thermal bonding conditions for PMMA
Table 5 Results of PMMA bonding strength tests