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J. Korean Soc. Precis. Eng.
Volume 41(10); 2024
Article
REGULAR
웨이퍼 이송 로봇의 심층학습과 진동신호 기반 정렬 유격 이상 진단 시스템
홍수빈
1
,
김혜진
1
,
이영대
1
,
문찬우
2,#
A Misalignment Diagnosis System for Wafer Transfer Robot based on Deep Learning and Vibration Signal
Su-bin Hong
1
,
Hye-jin Kim
1
,
Young-dae Lee
1
,
Chanwoo Moon
2,#
Journal of the Korean Society for Precision Engineering 2024;41(10):807-814.
Published online: October 1, 2024
DOI:
https://doi.org/10.7736/JKSPE.024.075
Author information
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information
1
㈜나인벨
2
국민대학교 전자공학부
1
Ninebell Co., Ltd.
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