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초정밀 조미동 위치결정기구의 설계 및 제어에 관한 연구

김재열, 조영태, 오보석, 오성민, 박기형

A Study on the Design and Control Super-Precision Coarse and Fine Positioning Apparatus

Jae-Yeol Kim, Young-Tae Cho, Bo-Suk O, Sung-Min O, Ki-Hyung Park
JKSPE 1996;13(10):88-93.
Published online: October 1, 1996



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A Study on the Design and Control Super-Precision Coarse and Fine Positioning Apparatus
J. Korean Soc. Precis. Eng.. 1996;13(10):88-93.   Published online October 1, 1996
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Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.
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A Study on the Design and Control Super-Precision Coarse and Fine Positioning Apparatus
J. Korean Soc. Precis. Eng.. 1996;13(10):88-93.   Published online October 1, 1996
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