Nano-scale fabrication of silicon substrate based on the use of atomic force microscopy (AFM) was demonstrated. A specially designed cantilever with diamond tip, allowing the formation of damaged layer on silicon substrate by a simple scratching process, has been applied instead of conventional silicon cantilever for scanning. A thin mask layer forms in the substrate at the diamond tip-sample junction along scanning path of the tip. The mask layer withstands against wet chemical etching in aqueous KOH solution. Diamond tip acts as a patterning tool like mask film for lithography process. Hence these sequential processes, called tribo-nanolithography, TNL, can fabricate 2D or 3D micro structures in nanometer range. This study demonstrates the novel fabrication processes of the micro cantilever and diamond tip as a tool for TNL using micro-patterning, wet chemical etching and CVD. The developed TNL tools show outstanding machinability against single crystal silicon wafer. Hence, they are expected to have a possibility for industrial applications as a micro-to-nano machining tool.

The purpose of this study was to investigate the significant characteristics in spray of industrial etch-nozzle for the design of process. The experiment was carried out with different spray pressure and industrial nozzle in wet etch. The characteristics of liquid spray, such as axial velocity and sauter mean diameter measurements were obtained by PDA. And impact force was calculated from spray characteristics. It was found that the fluid with higher spray pressure resulted in the smaller SMD and the higher droplet velocity and impact force. The depth of etch was increased in case of high spray pressure. In the case of injection angle oscillated between 20°, the result indicated constant effect of etch. The correlation between the spray characteristics and etch ones were analyzed. The depth of etch had good positive correlation with axial velocity and impact force. The result clearly shows that the characteristics in wet etch are strongly related to the spray characteristics with process.

Enhancement methods of sensitivity to in-plane strain measurement by micro-ESPI(Electronic Speckle Pattern Interferometry) technique were proposed using TiN and Au thin films. Micro-tensile strain over the micro-tensile specimens, prepared in micro-scale by those films, was measured by micro-tensile loading system and micro-ESPI system developed in this study. The subsequent measurement of in-plane tensile strain in the micro-sized specimens was introduced using the micro-ESPI technique, and the micro-tensile stress-strain curves for these films were determined. To enhance the sensitivity to measurement of in-plane tensile strain, algorithms of the phase estimation by using curve fitting of inter-fringe and the discrete Fourier Transform with object-induced dynamic phase shifting were developed. Using these two algorithms, the micro-tensile strain-stress curves were generated. It is shown that the algorithms for enhancement of the sensitivity suggested in this study make the sensitivity to measurement of the in-plane tensile strain increase.

In this paper, a uniform speed controller for an ultrasonic rotary motor is developed using the phase-difference method. The phase difference method uses traveling waves to drive the ultrasonic motor. The traveling waves are obtained by adding two standing waves that have a different phase to each other. A compact phase-difference driver system is designed and integrated by combining VCO(Voltage Controlled Oscillator) and phase shifter. Theoretically the relationship between the phase difference in time and the rotational speed of the ultrasonic motor is sine function, which is verified by experiments. Then a series of experiments under various loading conditions are conducted to characterize the motor's performance that is the relationship between the speed and torque.
Proportional-integral control is adopted for the uniform speed control. The proportional control unit calculates the compensating phase-difference using the rotating speed which is measured by an encoder and fed back. Integral control is used to eliminate steady-state errors. Differential control for reducing overshoot is not used since the response of ultrasonic motor is prompt due to its low inertia and friction-driving characteristics. The developed controller demonstrates reasonable performance overcoming disturbing torque and the changes in material properties due to continuous usage.

We measured grating pitch standards using optical diffractometry and analyzed measurement uncertainty. Grating pitch standards have been used widely as a magnification standard for a scanning electron microscope (SEM) and a scanning probe microscope (SPM). Thus, to establish the meter-traceability in nano-metrology using SPM and SEM, it is important to certify grating pitch standards accurately. The optical diffractometer consists of two laser sources, argon ion laser (488 ㎚) and He-Cd laser (325 ㎚), optics to make an incident beam, a precision rotary table and a quadrant photo-diode to detect the position of diffraction beam. The precision rotary table incorporates a calibrated angle encoder, enabling the precise and accurate measurement of diffraction angle. Applying the measured diffraction angle to the grating equation, the mean pitch of grating specimen can be obtained very accurately. The pitch and orthogonality of two-dimensional grating pitch standards were measured, and the measurement uncertainty was analyzed according to the Guide to the Expression of Uncertainty in Measurement. The expanded uncertainties (k = 2) in pitch measurement were less than 0.015 ㎚ and 0.03 ㎚ for the specimen with the nominal pitch of 300 ㎚ and 1000 ㎚. In the case of orthogonality measurement, the expanded uncertainties were less than 0.006°. In the pitch measurement, the main uncertainty source was the variation of measured pitch values according to the diffraction order. The measurement results show that the optical diffractometry can be used as an effective calibration tool for grating pitch standards.

This paper proposes a new steel strip surface inspection system. The system acquires bright and dark field images of defects by using a stroboscopic IR LED illuminator and area camera system and the defect images are preprocessed and segmented in real time for feature extraction. 4113 defect samples of hot rolled steel strip are used to develop KNN (k-Nearest Neighbor) classifier which classifies the defects into 8 different types. The developed KNN classifier demonstrates about 85% classifying performance which is considered very plausible result.

In this paper a new shape reconstruction method that allows us to construct surface models from very large sets of points is presented. In this method the global domain of interest is divided into smaller domains where the problem can be solved locally. These local solutions of subdivided domains are blended together according to weighting coefficients to obtain a global solution using partition of unity function. The suggested approach gives us considerable flexibility in the choice of local shape functions which depend on the local shape complexity and desired accuracy. At each domain, a quadratic polynomial function is created that fits the points in the domain. If the approximation is not accurate enough, other higher order functions including cubic polynomial function and RBF(Radial Basis Function) are used. This adaptive selection of local shape functions offers robust and efficient solution to a great variety of shape reconstruction problems.

The objective of this research is to investigate the electromagnetic interference(EMI) shielding characteristics of fiber reinforced composites. We fabricated glass and carbon fiber reinforced composites filled with metal powder and nano carbon black. The measurements of shielding effectiveness(SE) were carried out frequency range 300㎒ - 1 ㎓ for commercial purposes such as electric or telecommunication devices. The return loss and loss due to absorption were also measured as a function of frequency in the micro wave(300㎒-1㎓) region. It is observed that the SE of the composites is the frequency dependent, increase with the increases in filler loading. The Mg metal powder filled composite showed higher SE compared to that of carbon black. The Mg metal powder/epoxy composite was shown to exhibit up to 40㏈ of SE. The results indicates that the composite having higher filler loading can be used for the purpose of EMI shielding as well as for some microwave applications.

Reusing is one of the most environmentally friendly recycling methods. For the economical remanufacturing of used cellular phone, the cellular phones should be design for easy disassembly. In this paper, we analyzed the components and connecting elements of cellular phones and developed a guideline for the design of the cellular phones. A software for the disassembly assessment was also developed. Redesigned cellular phone by the developed guideline and its original phone was analyzed by the disassembly assessment software. Disassembly time could be reduced about 40% and reusing rate could be improved about 37%.

Kriging model is widely used as design DACE(analysis and computer experiments) model in the field of engineering design to accomplish computationally feasible design optimization. In this paper, the optimization of gate valve was performed using Kriging based approximation model. The DACE modeling, known as the one of Kriging interpolation, is introduced to obtain the surrogate approximation model of the function. In addition, we describe the definition, the prediction function and the algorithm of Kriging method and examine the accuracy of Kriging by using validation method.